Electronic Characterization Inside the TEM

The NEI Two-Channel STEM EBIC System is a co-developed system from Hummingbird Scientific and NanoElectronic Imaging (NEI) that measures Electron Beam-Induced Current (EBIC) during TEM and STEM experiments. Combining a dedicated TEM holder, low-noise current measurement electronics, and compatible sample substrates, it simultaneously acquires Electron Beam-Induced Current (EBIC), Secondary Electron Electron Beam-Induced Current (SEEBIC), TEM/STEM imaging, Energy-Dispersive X-ray Spectroscopy (EDS), and Electron Energy Loss Spectroscopy (EELS) datasets for correlative electronic, structural, and chemical analysis.

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Accelerating Semiconductor and Functional Materials Research

Correlate conductivity, charge transport, electric fields, polarization, charge accumulation, and current pathways with crystal structure and composition during a single experiment. Two independent EBIC channels distinguish complementary current signals while maintaining direct correlation with ADF, BF, EDS, and EELS. Optional integrated heating extends the workflow to temperature-dependent electronic characterization.

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Correlative Analysis of Electronic, Structural, and Chemical Properties

Conventional TEM and STEM reveal morphology, crystallography, and composition but do not directly measure electronic properties. Electron Beam-Induced Current (EBIC) complements these techniques by mapping beam-induced current in electrically contacted samples. Correlate electronic, structural, and chemical information from the same nanoscale region to better understand device performance, material response, and failure mechanisms in semiconductor devices, functional materials, and nanoelectronic systems.