Coarse movement, X axis
>1000 µm
Coarse movement, Y/Z axes
500–1000 µm
Fine movement, X axis
2–3 µm
Fine movement, Y/Z axes
~40 µm
Electrical contacts
2 standard; 3–7 optional
Current resolution
100 pA standard; <10 pA optional
Sample compatibility
3 mm half grids; FIB lift-out grids; custom optional
Probe control
Coarse thumb-screw motion; fine piezoelectric motion
Electrical measurement
Integrated voltage source meter