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SEM MEMS Heating + Biasing

Operando heating, biasing under environmental conditions

High-Temperature SEM Heating and Biasing on MEMS Chips

The Hummingbird Scientific SEM MEMS Heating + Biasing sample holder enables researchers to heat and electrically bias samples inside the SEM while observing surface morphology, compositional changes, and device response under controlled stimulus. The platform combines MEMS microheater chips, on-chip temperature sensing, direct chip contacts, and integrated controller support for in-situ SEM materials research.

Designed for Device, Catalyst, and Functional Materials Studies

The holder supports experiments involving electrical transport, failure analysis, semiconductor and thin-film materials, catalysts, low-dimensional materials, quantum materials, and temperature-driven transformations where heating, biasing, and SEM imaging must be correlated.

Correlate SEM, TEM, and X-ray Data from Related MEMS Experiments

By combining MEMS heating, electrical biasing, and EDS-compatible SEM analysis, researchers can connect surface morphology, elemental information, temperature, and electrical stimulus. The platform also fits into Hummingbird Scientific’s broader MEMS heating and biasing ecosystem for cross-correlative SEM, TEM, and synchrotron X-ray workflows.

Technical Specs
1590 Series – SEM
Electrical Contacts
9
Contact Type
Direct chip contact
Max Operating Temperature
>1000 °C
Settled Resolution at 1000 °C
Up to SEM resolution
Temperature Stability
100+ hours
Temperature Measurement
4-point resistance sensing
Special Cabling and Sample Carriers
High-voltage or high-frequency biasing options
EDS Compatible
Yes, full temperature range
SEM Compatibility
Custom integration
Instrument Type
SEM

Available For:

Key Features and Capabilities

High-Frequency Biasing

Configure cabling and sample carriers for specialized high-frequency SEM biasing experiments.

High-Voltage Biasing

Configure cabling and sample carriers for specialized high-voltage SEM biasing experiments.

Integrated Heating and Biasing Control

Set temperature conditions and voltage sweeps through integrated controller software.

EDS-Compatible High-Temperature SEM Analysis

Collect EDS data across the full temperature range during heating and biasing.

Cross-Correlative MEMS Chip Workflow

Use related MEMS heating and biasing workflows across SEM, TEM, and X-ray analysis.

9-Contact Electrical Biasing

Apply electrical stimulus through 9 direct contacts for SEM device experiments.

High-Temperature MEMS Heating

Heat SEM samples above 1000 °C with closed-loop MEMS heater control.

Advanced Configuration Options